List of selected publications of D.I.Astakhov

  1. Astakhov D.I., Goedheer W.J., Lee C.J., Ivanov V.V., Krivtsun V.M., Zotovich A.I., Zyryanov S.M., Lopaev D.V., Bijkerk F. Plasma probe characteristics in low density hydrogen pulsed plasmas. - Plasma Sources Science & Technology, 2015, v.24, No.5, p.5018.
  2. Van der Horst R.M., Beckers J., Osorio E.A., Astakhov D.I., Goedheer W.J., Lee C.J., Ivanov V.V., Krivtsum V.M., Koshelev K.N., Lopaev D.V., Bijkerk F., Banine V.Y. Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen. - J.Phys.D, 2016, v.49, No.14, p.5203.
  3. Astakhov D.I., Goedheer W.J., Lee C.J., Ivanov V.V., Krivtsun V.M., Koshelev K.N., Lopaev D.V., Van der Horst R.M., Beckers J., Osorio E.A., Bijkerk F. Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen. - J.Phys.D, 2016, v.49, No.29, p.5204.
  4. Abrikosov A., Reshetnyak V., Astakhov D., Dolgov A., Yakushev O., Lopaev D., Krivtsun V. Numerical simulations based on probe measurements in EUV-induced hydrogen plasma. - Plasma Sources Science & Technology, 2017, v.26, No.4, p.5011.
  5. Abramenko D.B., Spiridonov M.V., Krainov P.V., Krivtsun V.M., Astakhov D.I., Medvedev V.V., Van Kampen M., Smeets D., Koshelev K.N. Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma. - Appl.Phys.Lett., 2018, v.112, No.16, p.4102.
  6. Abramenko D.B., Antsiferov P.S., Astakhov D.I., Vinokhodov A.Y., Vichev I.Y., Gayazov R.R., Grushin A.S., Dorokhin L.A., Ivanov V.V., Kim D.A., Koshelev K.N., Krainov P.V., Krivokorytov M.S., Krivtsun V.M., Lakatosh B.V., Lash A.A., Medvedev V.V., Ryabtsev A.N., Sidelnikov Yu.V., Snegirev E.P., Solomyannaya A.D., Spiridonov M.V., Tsygvintsev I.P., Yakushev O.F., Yakushkin A.A. Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences). - Physics - Uspekhi, 2019, v.62, No.3, p.304-314.
  7. Абраменко Д.Б., Анциферов П.С., Астахов Д.И., Виноходов А.Ю., Вичев И.Ю., Гаязов Р.Р., Грушин А.С., Дорохин Л.А., Иванов В.В., Ким Д.А., Кошелев К.Н., Крайнов П.В, Кривокорытов М.С., Кривцун В.М., Лакатош Б.В., Лаш А.А., Медведев В.В., Рябцев А.Н., Сидельников Ю.В., Снегирев Е.П., Соломянная А.Д., Спиридонов М.В., Цыгвинцев И.П., Якушев О.Ф., Якушкин А.А. Плазменные источники экстремального ультрафиолетового излучения для литографии и сопутствующих технологических процессов (к 50-летию Института спектроскопии РАН) – Успехи Физических Наук, 2019, т.189, № 3 , с.: 323-334.
  8. Krainov P.V., Ivanov V.V., Astakhov D.I., Medvedev V.V., Kvon V.V., Yakunin A.M., van de Kerkhof M.A. Dielectric Particle Lofting from Dielectric Substrate Exposed to Low-energy Electron Beam. - Plasma Sources Science and Technology, 2020, v.29, No.8, artno.085013.
  9. van de Kerkhof M.V., Yakunin A.M.,  Astakhov D.I., van Kampen M., van der Horst R., Banine V.Y. EUV-induced hydrogen plasma: pulsed mode operation and confinement in scanner. - Journal of Micro/Nanopatterning, Materials and Metrology, 2021, v.20, No.3, artno. 033801.
  10. Mikhailenko M.S., Pestov A.E., Chkhalo N.I., Goncharov L.A., Chernyshev A.K., Zabrodin I.G., Kaskov I., Krainov P.V., Astakhov D.I., Medvedev V.V. Miniature Source of Accelerated Ions with Focusing Ion-optical System. - Nucl. Instr. & Meth. in Phys. Res., Sec.A, 2021, v.1010, artno.165554.
  11. Gubarev V.M., Lopayev D., Zotovich A., Medvedev V.V., Krainov P.V., Astakhov D.I., Zyryanov S. Dynamics of H atoms surface recombination in low-temperature plasma. - J. Appl. Phys., 2022, v.132, No.19, p.193301.
  12. De Kerkhof M.V., Osorio E., Krivtsun V.M., Spiridonov M., Astakhov D.I., Medvedev V.V. Miniature plasma source for in situ extreme ultraviolet lithographic scanner cleaning. - J. Vac. Sci. Technol. B: Nanotechnology and Microelectronics, 2022, v.40, No.21, p.022601.
  13. van de Kerkhof M.V., Yakunin A.M., Kvon V., Nikipelov A., Astakhov D.I., Krainov P.V.; Banine, V.Y. EUV-induced hydrogen plasma and particle release. - Radiation Effects and Defects in Solids, 2022, v.177, No.5-6, p. 486-512.
  14. Krainov P.V., Ivanov V.V., Astakhov D.I., Medvedev V.V., van de Kerkhof M.V. Role of Ion Accumulation in Lofting of Submicrometer-sized Dielectric Particle from Dielectric Surface by Plasma and Low-energy Electron Beam. - Proc. SPIE , 2022, v. 12051 Optical and EUV Nanolithography XXXV , p.1205103.
For more data please contact
e-mail: d dot i dot Astak at gmail dot com