List of selected publications of V.V.Medvedev

  1. Medvedev V.V., Yakshin A.E., Van de Kruijs R.W.E., Krivtsun V.M., Yakunin A.M., Koshelev K.N., Bijkerk F. Infrared suppression by hybrid EUV multilayer-IR etalon structures. - Optics Letters, 2011, v.36, No.17, p.3344-3346.
  2. Koshelev K., Krivtsun V., Ivanov V., Yakushev O., Chekmarev A., Koloshnikov V., Snegirev E., Medvedev V. New type of discharge-produced plasma source for extreme ultraviolet based on liquid tin jet electrodes. - Journal of Micro - Nanolithography Mems and Moems, 2012, v.11, No.2, p.1103.
  3. Medvedev V.V., Yakshin A. E., Van de Kruijs R W.E., Krivtsun V.M., Yakunin A.M., Koshelev K.N., Bijkerk F. Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors. - Optics Letters, 2012, v.37, No.7, p.1169-1171.
  4. Koshelev K.N., Ivanov V.V., Novikov V.G., Medvedev V., GrushinA.S., Krivtsun V.M. RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation. - Journal of Micro - Nanolithography Mems and Moems, 2012, v.11, No.2, p.1112.
  5. Medvedev V.V., Van den Boogaard A.J.R., Van der Meer R., Yakshin A.E., Louis E., Krivtsun V.M., Bijkerk F. Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors. - Opt.Express, 2013, v.21, No.14, p.16964-16974.
  6. Popov M., Gayazov R., Khadzhiyskiy F., Medvedev V., Krivtsun V., Kirichenko A., Kulnitskiy B., Perezhogin I., Tyukalova E., Blank V. C-60 three-dimensional polymerization by impulse heating effect. - J.Appl.Phys., 2014, v.115, No.15, p.3506.
  7. Dolgov A., Lopaev D., Lee C.J., Zoethout E., Medvedev V., Yakushev O., Bijkerk F. Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source. - Appl.Surface Science, 2015, v.353, p.708-713.
  8. Medvedev V.V., Yang J., Schmidt A.J., Yakshin A.E., Van de Kruijs R.W.E., Zoethout E., Bijkerk F. Anisotropy of heat conduction in Mo/Si multilayers. - J.Appl.Phys., 2015, v.118, No.8, p.5101.
  9. Medvedev V.V., Yakshin A.E., Van de Kruijs R.W.E., Bijkerk F. Phosphorus-based compounds for EUV multilayer optics materials. - Optical Materials Express, 2015, v.5, No.6, p.1450-1459.
  10. Vinokhodov A.Y., Krivokorytov M.S., Sidelnikov Yu.V., Krivtsun V.M., Medvedev V.V., Koshelev K.N. Droplet-based, high-brightness extreme ultraviolet laser plasma source for metrology. - J.Appl.Phys., 2016, v.120, No.16, p.3304.
  11. Vinokhodov A., Krivokorytov M., Sidelnikov Yu.V., Krivtsun V., Medvedev V., Bushuev V., Koshelev K., Glushkov D., Ellwi S. Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source. - Rev.Sci.Instrum., 2016, v.87, No.10, p.3304.
  12. Vinokhodov A.Y., Krivokorytov M.S., Sidelnikov Y.V., Krivtsun V.M., Medvedev V.V., Koshelev K.N. High-brightness EUV source based on laser plasma using a liquid-metal droplet target. - Quant. Electronics, 2016, v.46, No.5, p.473-480.
  13. Vinokhodov A.Y., Koshelev K.N., Krivtsun V.N., Krivokorytov M.S., Sidelnikov Y.V., Medvedev V.V., Kompanets V.O., Melnikov A.A., Chekalin S.V. Formation of a fine-dispersed liquid-metal target under the action of femto-and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range. - Quant. Electronics, 2016, v.46, No.1, p.23-28.
  14. Reshetniak V.V., Mavrin B.N., Edgar J.H., Whiteley C.E., Medvedev V.V. Phonon states of B12P2 crystals: Ab initio calculation and experiment. - J.Phys.Chem.of Solids, 2017, v.110, p.248-253.
  15. Huber S.P., Medvedev V.V., Gullikson E., Padavala B., Edgar J.H., Van de Kruijs R.W.E., Bijkerk F., Prendergast D. Determining crystal phase purity in c-BP through X-ray absorption spectroscopy. - Phys.Chem.Chem.Phys., 2017, v.19, No.12, p.8174-8187.
  16. Krivokorytov M.S., Vinokhodov A.Y., Sidelnikov Y.V., Krivtsun V.M., Kompanets V.O., Lash A.A., Koshelev K.N., Medvedev V.V. Cavitation and spallation in liquid metal droplets produced by subpicosecond pulsed laser radiation. - Phys.Rev.E, 2017, v.95, No.3, p.1101.
  17. Huang Q., Medvedev V., Van de Kruijs R., Yakshin A., Louis E., Bijkerk F. Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics. - Appl.Phys.Rev., 2017, v.4, No.1, p.1104.
  18. Basko M.M., Krivokorytov M.S., Vinokhodov A.Y., Sidelnikov Y.V., Krivtsun V.M., Medvedev V.V., Kim D.A., Kompanets V.O., Lash A.A., Koshelev K.N. Fragmentation dynamics of liquid-metal droplets under ultra-short laser pulses. - Laser Phys.Lett., 2017, v.14, No.3, p.6001.
  19. Grigoryev S.Y., Lakatosh B.V., Krivokorytov M.S., Zhakhovsky V.V., Dyachkov S.A., Ilnitsky D.K., Migdal K.P., Inogamov N.A., Vinokhodov A.Y., Kompanets V.O., Sidelnikov Y.V., Krivtsun V.M., Koshelev K.N., Medvedev V.V. Expansion and Fragmentation of a Liquid-Metal Droplet by a Short Laser Pulse. - Phys.Rev.Appl., 2018, v.10, No.6, p.4009.
  20. Abramenko D.B., Spiridonov M.V., Krainov P.V., Krivtsun V.M., Astakhov D.I., Medvedev V.V., Van Kampen M., Smeets D., Koshelev K.N. Measurements of hydrogen gas stopping efficiency for tin ions from laser-produced plasma. - Appl.Phys.Lett., 2018, v.112, No.16, p.4102.
  21. Krivokorytov M.S., Zeng Q., Lakatosh B.V., Vinokhodov A.Y., Sidelnikov Y.V., Kompanets V.O., Krivtsun V.M., Koshelev K.N., Ohl C.D., Medvedev V.V. Shaping and Controlled Fragmentation of Liquid Metal Droplets through Cavitation. - Sci Rep, 2018, v.8, p.597.
  22. Lakatosh B.V., Abramenko D.B., Ivanov V.V., Medvedev V.V., Krivtsun V.M., Koshelev K.N., Yakunin A.M. Propulsion of a flat tin target with pulsed CO2 laser radiation: measurements using a ballistic pendulum. - Laser Phys.Lett., 2018, v.15, No.1, p.6003.
  23. Koshelev K., Vinokhodov A., Yakushev O., Yakushkin A., Abramenko D., Lash A., Krivokorytov M., Sidelnikov Y., Ivanov V., Krivtsun V., Medvedev V., Glushkov D., Seroglazov P., Ellwi S., Lebert R. Debris free high brightness ligth source based on LPP for actinic EUV microscopy and metrology applications. - Proc.of SPIE Conf.on EUV Lithography (EUVLS), 2018, v.10809.
  24. Vinokhodov A.Y., Yakushkin A.A., Yakushev O.F., Krivokorytov M.S., Krivtsun V.M., Medvedev V.V., Lash A.A., Koshelev K.N. A Magnetohydrodynamic System for Pumping Liquid Metal Media in a Plasma Source of Extreme Ultraviolet Radiation. - Instrum.Exp.Tech., 2019, v.62, No.2, p.283-288.
  25. Gubarev V.M., Yakovlev V.Y., Sertsu M.G., Yakushev O.F. Krivtsun V.M., Gladush Y.G., Ostanin I.A., Sokolov A., Schoefers F., Medvedev V.V., Nasibulin A.G. Single-walled Carbon Nanotube Membranes for Optical Applications in the Extreme Ultraviolet Range. – Carbon, 2019, v.155, p.734-739.
  26. Абраменко Д.Б., Анциферов П.С., Астахов Д.И., Виноходов А.Ю., Вичев И.Ю., Гаязов Р.Р., Грушин А.С., Дорохин Л.А., Иванов В.В., Ким Д.А., Кошелев К.Н., Крайнов П.В, Кривокорытов М.С., Кривцун В.М., Лакатош Б.В., Лаш А.А., Медведев В.В., Рябцев А.Н., Сидельников Ю.В., Снегирев Е.П., Соломянная А.Д., Спиридонов М.В., Цыгвинцев И.П., Якушев О.Ф., Якушкин А.А. Плазменные источники экстремального ультрафиолетового излучения для литографии и сопутствующих технологических процессов (к 50-летию Института спектроскопии РАН) – Успехи Физических Наук, 2019, т.189, № 3 , с.: 323-334.
  27. Abramenko D.B., Antsiferov P.S., Astakhov D.I., Vinokhodov A.Y., Vichev I.Y., Gayazov R.R., Grushin A.S., Dorokhin L.A., Ivanov V.V., Kim D.A., Koshelev K.N., Krainov P.V., Krivokorytov M.S., Krivtsun V.M., Lakatosh B.V., Lash A.A., Medvedev V.V., Ryabtsev A.N., Sidelnikov Yu.V., Snegirev E.P., Solomyannaya A.D., Spiridonov M.V., Tsygvintsev I.P., Yakushev O.F., Yakushkin A.A. Plasma-based sources of extreme ultraviolet radiation for lithography and mask inspection (50th anniversary of the Institute of Spectroscopy, Russian Academy of Sciences). - Physics - Uspekhi, 2019, v.62, No.3, p.304-314.
  28. Виноходов А.Ю., Якушкин А.А., Якушев О.Ф., Кривокорытов М.С., Кривцун В.М., Медведев В.В., Лаш А.А., Кошелев К.Н. Магнитогидродинамическая система для прокачки жидких металлов в плазменном источнике экстремального ультрафиолетового излучения. - Приборы и техника эксперимента, 2019, №2, с: 129-135.
  29. Solyankin P.M., Lakatosh B.V., Krivokorytov M.S., Tsygvintsev I.P., Sinko A.S., Kotelnikov I.A., Makarov V.A., Coutaz J.L., Medvedev V.V., Shkurinov A.P. Single Free-Falling Droplet of Liquid Metal as a Source of Directional Terahertz Radiation. - Phys. Rev. Applied v.14, artno.034033.
  30. Milov I., Zhakhovsky V., Ilnitsky D., Migdal K., Khokhlov V., Petrov Y., Inogamov N., Lipp V., Medvedev N., Ziaja B., Medvedev V., Makhotkin IA., Louis E., Bijkerk F. Two-level ablation and damage morphology of Ru films under femtosecond extreme UV irradiation. - Applied Surface Science, v. 528, artno.146952.
  31. Gubarev V.M., Yakovlev V.Y., Sertsu M.G., Yakushev O.F., Krivtsun V.M., Gladush Y.G., Ostanin I.A., Sokolov A., Schafers F., Medvedev V.V., Nasibulin A.G. Corrigendum to "Single-walled carbon nanotube membranes for optical applications in the extreme ultraviolet rang" (vol 155,(2019) 734-739). – Carbon, 2020, v.156, p.576.
  32. Krainov P.V., Ivanov V.V., Astakhov D.I., Medvedev V.V., Kvon V.V., Yakunin A.M., van de Kerkhof M.A. Dielectric Particle Lofting from Dielectric Substrate Exposed to Low-energy Electron Beam. - Plasma Sources Science and Technology, 2020, v.29, No.8, artno.085013.
  33. Shkurinov A.P.,  Solyankin P.M., Lakatosh B.V., Krivokorytov M.S., Medvedev V.V. Efficient Terehertz Generation with Two Pulse Photoexcitation of Metal Microdroplet. - AIP Conf. Proc., 2020, v.2299, p.030003.
  34. Wulan Q., He D., Zhang T., Peng H., Liu L., Medvedev V.V., Liu Z. Salisbury Screen Absorbers Using Epsilon-near-zero Substrate. - Mater. Res. Express, 2021, v.8 No.1, p.016406.
  35. Medvedev V.V., Gubarev V.V.,  Zoethout E.,  Novikova N.N. Interference-enhanced Absorption Of Visible And Near-infrared Radiation In Ultrathin Film Coatings. - IEEE Photonics Technology Letters, 2021, v. 33, No.22, p.1242-1245.
  36. van de Kerkhof M.V., Yakunin A.M.,  Astakhov D.I., van Kampen M., van der Horst R., Banine V.Y. EUV-induced hydrogen plasma: pulsed mode operation and confinement in scanner. - Journal of Micro/Nanopatterning, Materials and Metrology, 2021, v.20, No.3, artno. 033801.
  37. Mikhailenko M.S., Pestov A.E., Chkhalo N.I., Goncharov L.A., Chernyshev A.K., Zabrodin I.G., Kaskov I., Krainov P.V., Astakhov D.I., Medvedev V.V. Miniature Source of Accelerated Ions with Focusing Ion-optical System. – Nucl. Instr. & Meth. in Phys. Res., Sec.A, 2021, v.1010, artno.165554.
  38. Medvedev V.V., Novikova N.N., Zoethout E. Salisbury screen with lossy nonconducting materials: Way to increase spectral selectivity of absorption. - Thin Solid Films, 2022, v.751, p.139232.
  39. Gubarev V.M., Lopayev D., Zotovich A., Medvedev V.V., Krainov P.V., Astakhov D.I., Zyryanov S. Dynamics of H atoms surface recombination in low-temperature plasma. - J. Appl. Phys., 2022, v.132, No.19, p.193301.
  40. De Kerkhof M.V., Osorio E., Krivtsun V.M., Spiridonov M., Astakhov D.I., Medvedev V.V. Miniature plasma source for in situ extreme ultraviolet lithographic scanner cleaning. - J. Vac. Sci. Technol. B: Nanotechnology and Microelectronics, 2022, v.40, No.21, p.022601.
  41. Ramirez B.J.A., Krasnikov D.V., Gubarev V.V., Novikov I.V., Kondrashov V.A., Starkov A.V., Krivokorytov M.S., Medvedev V.V., Gladush Yu.G., Nasibulin A.G. Renewable single-walled carbon nanotube membranes for extreme ultraviolet pellicle applications. - Carbon, 2022, v.198, p.364-370.
  42. Gubarev V.V., Krivokorytov M.S., Ramirez B.J.A., Krivtsun V.M., Ivanov V.V., Medvedev V.V., Pal A., Krasnikov D.V., Nasibulin A.G. InSn plasma penetration through protective single-walled carbon nanotube-based membranes. - Appl. Phys. Let., 2022, v.121, No.14, p.141901.
  43. Grigoryev S.Yu., Lakatosh B.V, Solyankin P.M., Krivokorytov M.S., Zhakhovsky V.V., Dyachkov S.A. , Ohl C.-D., Shkurinov A.P., Medvedev V.V. Jet Effusion from a Metal Droplet Irradiated by a Polarized Ultrashort Laser Pulse. - Phys. Rev. Applied, 2022, v.18, No.2, p.024072.
  44. Krainov P.V., Ivanov V.V., Astakhov D.I., Medvedev V.V., van de Kerkhof M.V. Role of Ion Accumulation in Lofting of Submicrometer-sized Dielectric Particle from Dielectric Surface by Plasma and Low-energy Electron Beam. – Proc. SPIE , 2022, v. 12051 Optical and EUV Nanolithography XXXV , p.1205103.
  45. Gubarev V.M., M. Krivokorytov M.S., Krivtsun V.M., Novikova N.N., Yakunin S., Pal A., Ramirez B.J.A., Krasnikov D.V., Medvedev V.V, Nasibulin A.G. Ar permeability through densified single-walled carbon nanotube-based membranes. - J. Appl. Phys., 2023, v.133, No.9, p.095106.
For more data please contact
v dot medvedev at rnd dash isan dot ru